@Article{jomm.18010104, AUTHOR = {Xiaoting Li; Rui Chen; Lei Qu; Xuanmin Zhu; Jing Zhang; Yanrong Wang; Shuhua Wei; Jiang Yan; Yayi Wei}, TITLE = {Analysis of Current Research Status of Plasma Etch Process Model}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {1}, YEAR = {2018}, PAGES = {18010104}, URL = {http://www.jommpublish.org/p/183/16/}, DOI = {10.33079/jomm.18010104} }