@Article{jomm.20030202, AUTHOR = {ChoongHyun Lee}, TITLE = {High-Pressure Oxidation on Ge: Improvement of Ge/GeO2 Interface and GeO2 Bulk Properties}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {3}, YEAR = {2020}, PAGES = {20030202}, URL = {http://www.jommpublish.org/p/183/54/}, DOI = {10.33079/jomm.20030202} }