@Article{jomm.20030303, AUTHOR = {Lei Qu; Chen Li; Jiang Yan; Rui Chen; Jing Zhang; Yanrong Wang; YaYi Wei}, TITLE = {Study on Simulation and Profile Prediction of Atomic Layer Deposition}, JOURNAL = {Journal of Microelectronic Manufacturing}, VOLUME = {3}, YEAR = {2020}, PAGES = {20030303}, URL = {http://www.jommpublish.org/p/183/57/}, DOI = {10.33079/jomm.20030303} }