TY - JOUR Lei Qu; Chen Li; Jiang Yan; Rui Chen; Jing Zhang; Yanrong Wang; YaYi WeiT1 - Study on Simulation and Profile Prediction of Atomic Layer Deposition JO - Journal of Microelectronic Manufacturing VL - 3 Y1 - 2020/10/08 UR - http://www.jommpublish.org/p/183/57/ L1 - http://www.jommpublish.org/jomm_data/publish/80/60/6D/1192B8454D90912F10FBF8C880/10.33079.jomm.20030303.pdf DO - 10.33079/jomm.20030303 ER -