TY - JOUR T1 - Recent Progress of the Integrated Circuit Industry in China ― Overview of the Special Equipment JO - Journal of Microelectronic Manufacturing VL - 4 Y1 - 2021/03/31 UR - http://www.jommpublish.org/p/183/71/ L1 - http://www.jommpublish.org/jomm_data/publish/6F/E3/30/46061F461099411B8BD180860A/10.33079.jomm.21040103.pdf DO - 10.33079/jomm.21040103 ER -