@Article{jomm.18010102,
AUTHOR = {Yu-Hao Tsai; Du Zhang; Mingmei Wang},
TITLE = {Silicon Nitride Etch via Oxidation Reaction in Fluorocarbon/Oxygen Plasma: A First-Principle Study},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {1},
YEAR = {2018},
PAGES = {18010102},
URL = {http://www.jommpublish.org/p/183/14/},
DOI = {10.33079/jomm.18010102}
}