@Article{jomm.18010104,
AUTHOR = {Xiaoting Li; Rui Chen; Lei Qu; Xuanmin Zhu; Jing Zhang; Yanrong Wang; Shuhua Wei; Jiang Yan; Yayi Wei},
TITLE = {Analysis of Current Research Status of Plasma Etch Process Model},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {1},
YEAR = {2018},
PAGES = {18010104},
URL = {http://www.jommpublish.org/p/183/16/},
DOI = {10.33079/jomm.18010104}
}