@Article{jomm.18010202,
AUTHOR = {Xu Ma; Zhiqiang Wang; Gonzalo R. Arce},
TITLE = {Compressive Sensing Approaches for Lithographic Source and Mask Joint Optimization},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {1},
YEAR = {2018},
PAGES = {18010202},
URL = {http://www.jommpublish.org/p/183/18/},
DOI = {10.33079/jomm.18010202}
}