@Article{jomm.18010205,
AUTHOR = {Xingyu Zhou; Youling Yu},
TITLE = {Hotspot Detection of Semiconductor Lithography Circuits Based on Convolutional Neural Network},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {1},
YEAR = {2018},
PAGES = {18010205},
URL = {http://www.jommpublish.org/p/183/21/},
DOI = {10.33079/jomm.18010205}
}