@Article{jomm.19020101,
AUTHOR = {Qiang Wu},
TITLE = {The Variables and Invariants in the Evolution of Logic Optical Lithography Process},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020101},
URL = {http://www.jommpublish.org/p/183/22/},
DOI = {10.33079/jomm.19020101}
}