@Article{jomm.19020202,
AUTHOR = {Nan Fu; Yanxiang Liu; Xiaolong Ma; Zanfeng Chen},
TITLE = {EUV Lithography: State-of-the-Art Review},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020202},
URL = {http://www.jommpublish.org/p/183/29/},
DOI = {10.33079/jomm.19020202}
}