@Article{jomm.19020204,
AUTHOR = {Lei Qu; Rui Chen; Xiaoting Li; Jing Zhang; Yanrong Wang; Shuhua Wei; Jiang Yan; Yayi Wei},
TITLE = {Development and Prospect of Process Models and Simulation Methods for Atomic Layer Deposition},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020204},
URL = {http://www.jommpublish.org/p/183/30/},
DOI = {10.33079/jomm.19020204}
}