@Article{jomm.19020301,
AUTHOR = {Jeff Shu},
TITLE = {Innovation on Line Cut Methods of Self-aligned Multiple Patterning},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020301},
URL = {http://www.jommpublish.org/p/183/32/},
DOI = {10.33079/jomm.19020301}
}