@Article{jomm.19020405,
AUTHOR = {Enming Shang; Yu Ding; Wenqiao Chen; Shaojian Hu; Shoumian Chen},
TITLE = {The Effect of Fin Structure in 5 nm FinFET Technology},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020405},
URL = {http://www.jommpublish.org/p/183/44/},
DOI = {10.33079/jomm.19020405}
}