@Article{jomm.20030201,
AUTHOR = {Man Gu; Wenjun Li; Haiting Wang; Owen Hu},
TITLE = {FinFET Performance Enhancement by Source/Drain Cavity Structure Optimization},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030201},
URL = {http://www.jommpublish.org/p/183/52/},
DOI = {10.33079/jomm.20030201}
}