@Article{jomm.20030202,
AUTHOR = {ChoongHyun Lee},
TITLE = {<b>High-Pressure Oxidation on Ge: Improvement of Ge/GeO<sub>2</sub> Interface and GeO<sub>2</sub> Bulk Properties</b>},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030202},
URL = {http://www.jommpublish.org/p/183/54/},
DOI = {10.33079/jomm.20030202}
}