TY  - JOUR
Wei Zhang; Jun Xu; Sicong Wang; Yi Zhou; Jian MiT1  - Metrology Challenges in 3D NAND Flash Technical Development and Manufacturing
JO  - Journal of Microelectronic Manufacturing
VL  - 3
Y1  - 2020/03/30
UR  - http://www.jommpublish.org/p/183/47/
L1  - http://www.jommpublish.org/jomm_data/publish/E9/04/B3/B839544A8DB720E12F451A7329/10.33079.jomm.20030102.pdf
DO  - 10.33079/jomm.20030102
ER  -