CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 2 Vol 2 (4) : 19020405 2019
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The Effect of Fin Structure in 5 nm FinFET Technology
Enming Shang, Yu Ding, Wenqiao Chen, Shaojian Hu, Shoumian Chen
： 2019 - 10 - 16
： 2019 - 12 - 25
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Journal of Microelectronic Manufacturing

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