CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Current Issue • Versions 2 Vol 3 (4) : 20030408 2020
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Machine Learning based Optical Proximity Correction Techniques
Pengpeng Yuan, Taian Fan, Yaobin Feng, Peng Xu, Yayi Wei
： 2020 - 10 - 09
： 2020 - 12 - 15
： 2020 - 12 - 30
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Journal of Microelectronic Manufacturing

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