Research Article Archive Versions 6 Vol 1 (1) : 18010102 2018
Download
Silicon Nitride Etch via Oxidation Reaction in Fluorocarbon/Oxygen Plasma: A First-Principle Study
: 2018 - 07 - 20
: 2018 - 09 - 30
2491 78 0
Statistics
Total views HTML PDF
2569 2491 78
Views by month
Total views
References
Journal of Microelectronic Manufacturing