CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 2 Vol 3 (3) : 20030303 2020
Download
Study on Simulation and Profile Prediction of Atomic Layer Deposition
Lei Qu, Chen Li, Jiang Yan, Rui Chen, Jing Zhang, Yanrong Wang, YaYi Wei
： 2020 - 09 - 09
： 2020 - 09 - 29
： 2020 - 10 - 08
1647 41 0
CSCD  ·  Badiu Scholar
References
Journal of Microelectronic Manufacturing

  • Copyright@JoMMPublish