CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 2 Vol 3 (3) : 20030303 2020
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Study on Simulation and Profile Prediction of Atomic Layer Deposition
Lei Qu, Chen Li, Jiang Yan, Rui Chen, Jing Zhang, Yanrong Wang, YaYi Wei
： 2020 - 09 - 09
： 2020 - 09 - 29
： 2020 - 10 - 08
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Journal of Microelectronic Manufacturing

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