Keywords：IC industry; Integrated Circuit Design Market
doi：10.33079/jomm.21040203
Abstract：
China's IC industry has been flourishing in recent years, huge market demand together with government investments are the major driving forces for this development. The status and development momen...
Authors: Haibo Li, Qian Yang, Jia Sun et al.
Keywords：Chemical amplification；thick film；i-Line；environment stability；Poly (p-hydroxyl styrene)；PAB；PEB
doi：10.33079/jomm.21040201
Abstract：
An i-Line chemically amplified (ICA) thick film positive resist is reported in this paper. The impact of process conditions on photoresist performance was investigated. Pre-apply bake temperature a...
Authors: Mark Neisser
Institution：Tan Kah Kee Innovation Laboratory
Keywords：Stochastics；Self-assembly；overlay；edge placement error；self-organizing；DNA origami；bottle brush polymers
doi：10.33079/jomm.21040202
Abstract：
Decades of progress in the semiconductor industry has led to lithographically printed dimensions that are small enough that the positions of individual molecules and the stochastic variation in the...
